光(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)供(gong)應(ying)商與(yu)(yu)客戶(hu)粘(zhan)性大(da)；一般(ban)情況下(xia)，為了保持光(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)供(gong)應(ying)和效果(guo)的(de)(de)(de)(de)穩(wen)定(ding)，下(xia)游客戶(hu)與(yu)(yu)光(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)供(gong)應(ying)商一旦建(jian)立供(gong)應(ying)關系后，不會輕易更換。通過建(jian)立反(fan)饋機制，滿足(zu)個性化需(xu)(xu)求，光(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)供(gong)應(ying)商與(yu)(yu)客戶(hu)的(de)(de)(de)(de)粘(zhan)性不斷增(zeng)加(jia)。后來者(zhe)想要(yao)加(jia)入到(dao)供(gong)應(ying)商行列(lie)，往往需(xu)(xu)要(yao)滿足(zu)比現有(you)供(gong)應(ying)商更高的(de)(de)(de)(de)要(yao)求。所以光(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)行業(ye)對新進入者(zhe)壁壘較高。通常光(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)等微電(dian)子(zi)化學品不僅品質要(yao)求高，而且需(xu)(xu)要(yao)多(duo)種不同的(de)(de)(de)(de)品類滿足(zu)下(xia)游客戶(hu)多(duo)樣化的(de)(de)(de)(de)需(xu)(xu)。如果(guo)沒(mei)有(you)規模效益，供(gong)應(ying)商就無法承擔(dan)滿足(zu)多(duo)樣化需(xu)(xu)求帶來的(de)(de)(de)(de)開銷。因此，品種規模構成了進入該行業(ye)的(de)(de)(de)(de)重要(yao)壁壘。廣東省科學院半導體研究所。光(guang)(guang)(guang)刻(ke)(ke)(ke)技(ji)術是一種重要(yao)的(de)(de)(de)(de)微電(dian)子(zi)制造(zao)技(ji)術，可(ke)以制造(zao)出高精度的(de)(de)(de)(de)微電(dian)子(zi)器(qi)件(jian)。中山光(guang)(guang)(guang)刻(ke)(ke)(ke)代工

光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)是(shi)一種特殊的(de)(de)(de)聚合物材(cai)料，主要用(yong)于半導(dao)(dao)體(ti)工業中(zhong)的(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)過(guo)(guo)程。在(zai)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)過(guo)(guo)程中(zhong)，光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)起(qi)著非(fei)常重要的(de)(de)(de)作(zuo)用(yong)。它(ta)可(ke)(ke)(ke)以通(tong)(tong)過(guo)(guo)光(guang)(guang)(guang)(guang)化(hua)學(xue)反(fan)(fan)應(ying)來(lai)(lai)形(xing)(xing)(xing)(xing)成圖(tu)案(an)，從而實現(xian)對半導(dao)(dao)體(ti)芯(xin)片(pian)(pian)的(de)(de)(de)精確制(zhi)(zhi)造(zao)。具體(ti)來(lai)(lai)說，光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)的(de)(de)(de)作(zuo)用(yong)主要有(you)以下幾個方面(mian)：1.光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)可(ke)(ke)(ke)以作(zuo)為(wei)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)模板(ban)。在(zai)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)過(guo)(guo)程中(zhong)，光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)被涂覆在(zai)半導(dao)(dao)體(ti)芯(xin)片(pian)(pian)表面(mian)，然(ran)后通(tong)(tong)過(guo)(guo)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)機(ji)器上的(de)(de)(de)模板(ban)來(lai)(lai)照(zhao)射。光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)會(hui)在(zai)模板(ban)的(de)(de)(de)光(guang)(guang)(guang)(guang)照(zhao)區域發(fa)生化(hua)學(xue)反(fan)(fan)應(ying)，形(xing)(xing)(xing)(xing)成圖(tu)案(an)。2.光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)可(ke)(ke)(ke)以保(bao)護芯(xin)片(pian)(pian)表面(mian)。在(zai)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)過(guo)(guo)程中(zhong)，光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)可(ke)(ke)(ke)以起(qi)到保(bao)護芯(xin)片(pian)(pian)表面(mian)的(de)(de)(de)作(zuo)用(yong)。光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)可(ke)(ke)(ke)以防止芯(xin)片(pian)(pian)表面(mian)受(shou)到化(hua)學(xue)腐蝕或機(ji)械(xie)損傷。3.光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)可(ke)(ke)(ke)以控(kong)制(zhi)(zhi)芯(xin)片(pian)(pian)的(de)(de)(de)形(xing)(xing)(xing)(xing)狀和(he)尺寸。在(zai)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)過(guo)(guo)程中(zhong)，光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)可(ke)(ke)(ke)以通(tong)(tong)過(guo)(guo)控(kong)制(zhi)(zhi)光(guang)(guang)(guang)(guang)照(zhao)的(de)(de)(de)時間和(he)強度來(lai)(lai)控(kong)制(zhi)(zhi)芯(xin)片(pian)(pian)的(de)(de)(de)形(xing)(xing)(xing)(xing)狀和(he)尺寸。這(zhe)樣就可(ke)(ke)(ke)以實現(xian)對芯(xin)片(pian)(pian)的(de)(de)(de)精確制(zhi)(zhi)造(zao)。總(zong)之，光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)在(zai)半導(dao)(dao)體(ti)工業中(zhong)起(qi)著非(fei)常重要的(de)(de)(de)作(zuo)用(yong)。它(ta)可(ke)(ke)(ke)以通(tong)(tong)過(guo)(guo)光(guang)(guang)(guang)(guang)化(hua)學(xue)反(fan)(fan)應(ying)來(lai)(lai)形(xing)(xing)(xing)(xing)成圖(tu)案(an)，從而實現(xian)對半導(dao)(dao)體(ti)芯(xin)片(pian)(pian)的(de)(de)(de)精確制(zhi)(zhi)造(zao)。功率(lv)器件光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)加工廠商光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)技(ji)術利用(yong)光(guang)(guang)(guang)(guang)敏材(cai)料和(he)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)(ke)(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)來(lai)(lai)制(zhi)(zhi)造(zao)微小的(de)(de)(de)圖(tu)案(an)和(he)結(jie)構。

光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)是(shi)一種特殊的(de)(de)(de)(de)(de)(de)(de)聚(ju)合(he)物材(cai)料，廣泛應(ying)用(yong)(yong)于(yu)半導體、光(guang)(guang)(guang)(guang)(guang)電子、微(wei)(wei)電子等領域的(de)(de)(de)(de)(de)(de)(de)微(wei)(wei)納(na)加(jia)(jia)工(gong)(gong)(gong)(gong)中(zhong)。在(zai)光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)過程中(zhong)，光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)的(de)(de)(de)(de)(de)(de)(de)作(zuo)用(yong)(yong)是(shi)將光(guang)(guang)(guang)(guang)(guang)學(xue)圖(tu)案(an)轉移到基板表面(mian)，形成(cheng)(cheng)所需(xu)的(de)(de)(de)(de)(de)(de)(de)微(wei)(wei)納(na)米結構。光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)的(de)(de)(de)(de)(de)(de)(de)基本原理是(shi)利用(yong)(yong)紫外線照射使其發生化學(xue)反應(ying)，形成(cheng)(cheng)交(jiao)聯聚(ju)合(he)物，從(cong)而形成(cheng)(cheng)所需(xu)的(de)(de)(de)(de)(de)(de)(de)微(wei)(wei)納(na)米結構。光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)的(de)(de)(de)(de)(de)(de)(de)選擇和(he)使用(yong)(yong)對(dui)于(yu)微(wei)(wei)納(na)加(jia)(jia)工(gong)(gong)(gong)(gong)的(de)(de)(de)(de)(de)(de)(de)成(cheng)(cheng)功至(zhi)關(guan)(guan)重要(yao)，因為(wei)它直(zhi)接影響(xiang)到微(wei)(wei)納(na)加(jia)(jia)工(gong)(gong)(gong)(gong)的(de)(de)(de)(de)(de)(de)(de)精(jing)度(du)、分辨率和(he)成(cheng)(cheng)本。在(zai)光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)過程中(zhong)，光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)的(de)(de)(de)(de)(de)(de)(de)作(zuo)用(yong)(yong)主要(yao)有以(yi)(yi)下幾個方面(mian)：1.光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)可以(yi)(yi)作(zuo)為(wei)光(guang)(guang)(guang)(guang)(guang)學(xue)圖(tu)案(an)的(de)(de)(de)(de)(de)(de)(de)傳遞介質，將光(guang)(guang)(guang)(guang)(guang)學(xue)圖(tu)案(an)轉移到基板表面(mian)。2.光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)可以(yi)(yi)起(qi)到保護(hu)基板的(de)(de)(de)(de)(de)(de)(de)作(zuo)用(yong)(yong)，防止基板表面(mian)被污染或受到損傷(shang)。3.光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)可以(yi)(yi)控制微(wei)(wei)納(na)加(jia)(jia)工(gong)(gong)(gong)(gong)的(de)(de)(de)(de)(de)(de)(de)深(shen)度(du)和(he)形狀，從(cong)而實現(xian)所需(xu)的(de)(de)(de)(de)(de)(de)(de)微(wei)(wei)納(na)米結構。4.光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)可以(yi)(yi)提高(gao)微(wei)(wei)納(na)加(jia)(jia)工(gong)(gong)(gong)(gong)的(de)(de)(de)(de)(de)(de)(de)精(jing)度(du)和(he)分辨率，從(cong)而實現(xian)更高(gao)的(de)(de)(de)(de)(de)(de)(de)微(wei)(wei)納(na)加(jia)(jia)工(gong)(gong)(gong)(gong)質量。總之，光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)在(zai)微(wei)(wei)納(na)加(jia)(jia)工(gong)(gong)(gong)(gong)中(zhong)起(qi)著(zhu)至(zhi)關(guan)(guan)重要(yao)的(de)(de)(de)(de)(de)(de)(de)作(zuo)用(yong)(yong)，它的(de)(de)(de)(de)(de)(de)(de)選擇和(he)使用(yong)(yong)對(dui)于(yu)微(wei)(wei)納(na)加(jia)(jia)工(gong)(gong)(gong)(gong)的(de)(de)(de)(de)(de)(de)(de)成(cheng)(cheng)功至(zhi)關(guan)(guan)重要(yao)。隨著(zhu)微(wei)(wei)納(na)加(jia)(jia)工(gong)(gong)(gong)(gong)技(ji)術(shu)的(de)(de)(de)(de)(de)(de)(de)不(bu)斷(duan)(duan)發展，光(guang)(guang)(guang)(guang)(guang)刻(ke)(ke)膠(jiao)(jiao)的(de)(de)(de)(de)(de)(de)(de)性能(neng)和(he)應(ying)用(yong)(yong)也將不(bu)斷(duan)(duan)得到改進和(he)拓展。

光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)是一種重要的(de)(de)(de)材料，廣泛應(ying)用(yong)(yong)(yong)于(yu)半導體(ti)、光(guang)(guang)(guang)(guang)電(dian)(dian)子(zi)、微(wei)(wei)(wei)電(dian)(dian)子(zi)等(deng)領(ling)域(yu)。不(bu)同類(lei)型的(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)有(you)不(bu)同的(de)(de)(de)優(you)(you)點(dian)(dian)，下面是幾種常(chang)見的(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)的(de)(de)(de)優(you)(you)點(dian)(dian)：1.紫外光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)：紫外光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)具(ju)有(you)高分(fen)辨(bian)率(lv)、高靈敏(min)度(du)(du)(du)、高對比度(du)(du)(du)等(deng)優(you)(you)點(dian)(dian)。它(ta)可(ke)(ke)以(yi)(yi)制(zhi)備出高精度(du)(du)(du)的(de)(de)(de)微(wei)(wei)(wei)結構，適(shi)用(yong)(yong)(yong)于(yu)制(zhi)造(zao)(zao)高密度(du)(du)(du)的(de)(de)(de)集成電(dian)(dian)路和(he)(he)微(wei)(wei)(wei)機(ji)電(dian)(dian)系(xi)統(tong)。2.電(dian)(dian)子(zi)束光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)：電(dian)(dian)子(zi)束光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)具(ju)有(you)極(ji)高的(de)(de)(de)分(fen)辨(bian)率(lv)和(he)(he)精度(du)(du)(du)，可(ke)(ke)以(yi)(yi)制(zhi)備出亞微(wei)(wei)(wei)米(mi)級(ji)別(bie)的(de)(de)(de)微(wei)(wei)(wei)結構。它(ta)適(shi)用(yong)(yong)(yong)于(yu)制(zhi)造(zao)(zao)高速、高頻率(lv)的(de)(de)(de)微(wei)(wei)(wei)電(dian)(dian)子(zi)器(qi)件。3.X射線光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)：X射線光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)具(ju)有(you)極(ji)高的(de)(de)(de)分(fen)辨(bian)率(lv)和(he)(he)深度(du)(du)(du)，可(ke)(ke)以(yi)(yi)制(zhi)備出納(na)米(mi)級(ji)別(bie)的(de)(de)(de)微(wei)(wei)(wei)結構。它(ta)適(shi)用(yong)(yong)(yong)于(yu)制(zhi)造(zao)(zao)高密度(du)(du)(du)、高速的(de)(de)(de)微(wei)(wei)(wei)電(dian)(dian)子(zi)器(qi)件。4.熱致(zhi)變形(xing)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)：熱致(zhi)變形(xing)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)具(ju)有(you)高分(fen)辨(bian)率(lv)、高靈敏(min)度(du)(du)(du)、高對比度(du)(du)(du)等(deng)優(you)(you)點(dian)(dian)。它(ta)可(ke)(ke)以(yi)(yi)制(zhi)備出高精度(du)(du)(du)的(de)(de)(de)微(wei)(wei)(wei)結構，適(shi)用(yong)(yong)(yong)于(yu)制(zhi)造(zao)(zao)微(wei)(wei)(wei)機(ji)電(dian)(dian)系(xi)統(tong)和(he)(he)光(guang)(guang)(guang)(guang)學器(qi)件。總之，不(bu)同類(lei)型的(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)有(you)不(bu)同的(de)(de)(de)優(you)(you)點(dian)(dian)，可(ke)(ke)以(yi)(yi)根據具(ju)體(ti)的(de)(de)(de)應(ying)用(yong)(yong)(yong)需求(qiu)選擇合適(shi)的(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)。光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)技術(shu)是集成電(dian)(dian)路制(zhi)造(zao)(zao)中利(li)用(yong)(yong)(yong)光(guang)(guang)(guang)(guang)學- 化學反應(ying)原理(li)(li)和(he)(he)化學、物理(li)(li)刻(ke)(ke)(ke)蝕方法。

光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)是(shi)一(yi)(yi)種(zhong)用(yong)(yong)于(yu)(yu)微電(dian)(dian)(dian)子(zi)(zi)(zi)制造(zao)(zao)中的(de)(de)(de)(de)(de)重要材(cai)料，它(ta)可(ke)以通過(guo)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)技術將(jiang)圖案(an)轉(zhuan)移到硅(gui)片上。根(gen)(gen)據不同的(de)(de)(de)(de)(de)應(ying)用(yong)(yong)需求，光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)可(ke)以分(fen)(fen)(fen)(fen)為以下幾種(zhong)類(lei)(lei)型：1.紫(zi)外(wai)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)：紫(zi)外(wai)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)是(shi)更(geng)常用(yong)(yong)的(de)(de)(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)之(zhi)一(yi)(yi)，它(ta)可(ke)以通過(guo)紫(zi)外(wai)線(xian)照(zhao)射(she)(she)來(lai)固(gu)化(hua)。紫(zi)外(wai)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)具有(you)高(gao)(gao)(gao)(gao)(gao)分(fen)(fen)(fen)(fen)辨(bian)(bian)率、高(gao)(gao)(gao)(gao)(gao)靈敏度(du)(du)(du)和(he)(he)高(gao)(gao)(gao)(gao)(gao)精度(du)(du)(du)等優點(dian)，適(shi)用(yong)(yong)于(yu)(yu)制造(zao)(zao)微小(xiao)結(jie)構(gou)和(he)(he)高(gao)(gao)(gao)(gao)(gao)密度(du)(du)(du)集成電(dian)(dian)(dian)路(lu)。2.電(dian)(dian)(dian)子(zi)(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)：電(dian)(dian)(dian)子(zi)(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)是(shi)一(yi)(yi)種(zhong)高(gao)(gao)(gao)(gao)(gao)分(fen)(fen)(fen)(fen)辨(bian)(bian)率的(de)(de)(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)，它(ta)可(ke)以通過(guo)電(dian)(dian)(dian)子(zi)(zi)(zi)束(shu)照(zhao)射(she)(she)來(lai)固(gu)化(hua)。電(dian)(dian)(dian)子(zi)(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)具有(you)極(ji)高(gao)(gao)(gao)(gao)(gao)的(de)(de)(de)(de)(de)分(fen)(fen)(fen)(fen)辨(bian)(bian)率和(he)(he)精度(du)(du)(du)，適(shi)用(yong)(yong)于(yu)(yu)制造(zao)(zao)微小(xiao)結(jie)構(gou)和(he)(he)高(gao)(gao)(gao)(gao)(gao)精度(du)(du)(du)器(qi)件(jian)。3.X射(she)(she)線(xian)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)：X射(she)(she)線(xian)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)是(shi)一(yi)(yi)種(zhong)高(gao)(gao)(gao)(gao)(gao)分(fen)(fen)(fen)(fen)辨(bian)(bian)率的(de)(de)(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)，它(ta)可(ke)以通過(guo)X射(she)(she)線(xian)照(zhao)射(she)(she)來(lai)固(gu)化(hua)。X射(she)(she)線(xian)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)具有(you)極(ji)高(gao)(gao)(gao)(gao)(gao)的(de)(de)(de)(de)(de)分(fen)(fen)(fen)(fen)辨(bian)(bian)率和(he)(he)精度(du)(du)(du)，適(shi)用(yong)(yong)于(yu)(yu)制造(zao)(zao)微小(xiao)結(jie)構(gou)和(he)(he)高(gao)(gao)(gao)(gao)(gao)精度(du)(du)(du)器(qi)件(jian)。4.離(li)子(zi)(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)：離(li)子(zi)(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)是(shi)一(yi)(yi)種(zhong)高(gao)(gao)(gao)(gao)(gao)分(fen)(fen)(fen)(fen)辨(bian)(bian)率的(de)(de)(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)，它(ta)可(ke)以通過(guo)離(li)子(zi)(zi)(zi)束(shu)照(zhao)射(she)(she)來(lai)固(gu)化(hua)。離(li)子(zi)(zi)(zi)束(shu)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)具有(you)極(ji)高(gao)(gao)(gao)(gao)(gao)的(de)(de)(de)(de)(de)分(fen)(fen)(fen)(fen)辨(bian)(bian)率和(he)(he)精度(du)(du)(du)，適(shi)用(yong)(yong)于(yu)(yu)制造(zao)(zao)微小(xiao)結(jie)構(gou)和(he)(he)高(gao)(gao)(gao)(gao)(gao)精度(du)(du)(du)器(qi)件(jian)。總(zong)之(zhi)，不同類(lei)(lei)型的(de)(de)(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)適(shi)用(yong)(yong)于(yu)(yu)不同的(de)(de)(de)(de)(de)應(ying)用(yong)(yong)需求，制造(zao)(zao)微電(dian)(dian)(dian)子(zi)(zi)(zi)器(qi)件(jian)時需要根(gen)(gen)據具體情況選(xuan)擇合適(shi)的(de)(de)(de)(de)(de)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)。表面有(you)顆(ke)粒、滴膠(jiao)(jiao)(jiao)(jiao)后(hou)精致時間過(guo)長(chang)，部分(fen)(fen)(fen)(fen)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)固(gu)話，解決的(de)(de)(de)(de)(de)方法(fa)主要有(you)更(geng)換(huan)光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)膠(jiao)(jiao)(jiao)(jiao)。中山光(guang)(guang)(guang)(guang)刻(ke)(ke)(ke)代工

光(guang)刻(ke)技(ji)術的精度和(he)分辨率越高，制(zhi)造的器件越小，應用范(fan)圍越廣。中山光(guang)刻(ke)代工(gong)

正膠(jiao)光(guang)(guang)(guang)(guang)(guang)刻(ke)的(de)(de)基本流(liu)程：襯(chen)底清(qing)(qing)洗、前烘以及預(yu)(yu)處理(li)，涂膠(jiao)、軟烘、曝(pu)(pu)光(guang)(guang)(guang)(guang)(guang)、顯(xian)(xian)影(ying)、圖(tu)(tu)形(xing)(xing)(xing)檢(jian)查(cha)，后(hou)烘。負(fu)膠(jiao)光(guang)(guang)(guang)(guang)(guang)刻(ke)的(de)(de)基本流(liu)程：襯(chen)底清(qing)(qing)洗、前烘以及預(yu)(yu)處理(li)、涂膠(jiao)、軟烘、曝(pu)(pu)光(guang)(guang)(guang)(guang)(guang)、后(hou)烘、顯(xian)(xian)影(ying)、圖(tu)(tu)形(xing)(xing)(xing)檢(jian)查(cha)。正膠(jiao)曝(pu)(pu)光(guang)(guang)(guang)(guang)(guang)前，光(guang)(guang)(guang)(guang)(guang)刻(ke)膠(jiao)不溶(rong)(rong)于顯(xian)(xian)影(ying)液(ye)，曝(pu)(pu)光(guang)(guang)(guang)(guang)(guang)后(hou)，曝(pu)(pu)光(guang)(guang)(guang)(guang)(guang)區溶(rong)(rong)于顯(xian)(xian)影(ying)液(ye)，圖(tu)(tu)形(xing)(xing)(xing)與掩膜版圖(tu)(tu)形(xing)(xing)(xing)相(xiang)同；而(er)負(fu)性光(guang)(guang)(guang)(guang)(guang)刻(ke)膠(jiao)，曝(pu)(pu)光(guang)(guang)(guang)(guang)(guang)前光(guang)(guang)(guang)(guang)(guang)刻(ke)膠(jiao)可(ke)溶(rong)(rong)于顯(xian)(xian)影(ying)液(ye)，曝(pu)(pu)光(guang)(guang)(guang)(guang)(guang)后(hou)，被曝(pu)(pu)光(guang)(guang)(guang)(guang)(guang)區不溶(rong)(rong)于顯(xian)(xian)影(ying)液(ye)，圖(tu)(tu)形(xing)(xing)(xing)與掩膜版圖(tu)(tu)形(xing)(xing)(xing)相(xiang)同。光(guang)(guang)(guang)(guang)(guang)刻(ke)可(ke)能會出現(xian)顯(xian)(xian)影(ying)不干凈的(de)(de)異常，主要(yao)原因可(ke)能是(shi)顯(xian)(xian)影(ying)時(shi)間(jian)不足、顯(xian)(xian)影(ying)溶(rong)(rong)液(ye)使用周(zhou)期過長，溶(rong)(rong)液(ye)溶(rong)(rong)解膠(jiao)量較(jiao)多、曝(pu)(pu)光(guang)(guang)(guang)(guang)(guang)時(shi)間(jian)不足，主要(yao)的(de)(de)解決(jue)方法(fa)有(you)增加(jia)顯(xian)(xian)影(ying)時(shi)間(jian)、更(geng)換新的(de)(de)顯(xian)(xian)影(ying)液(ye)，增強溶(rong)(rong)液(ye)溶(rong)(rong)解能力、增加(jia)曝(pu)(pu)光(guang)(guang)(guang)(guang)(guang)時(shi)間(jian)。中山光(guang)(guang)(guang)(guang)(guang)刻(ke)代工

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