【濺(jian)(jian)鍍(du)(du)工藝的原(yuan)理】以幾(ji)十電(dian)子(zi)伏特或更高(gao)動(dong)能的荷電(dian)粒(li)子(zi)轟擊材(cai)(cai)(cai)料(liao)表面，使其(qi)濺(jian)(jian)射(she)(she)出(chu)進入氣相(xiang)，可(ke)用來刻蝕和鍍(du)(du)膜。入射(she)(she)一(yi)個離子(zi)所(suo)濺(jian)(jian)射(she)(she)出(chu)的原(yuan)子(zi)個數稱為濺(jian)(jian)射(she)(she)產(chan)額(Yield)產(chan)額越高(gao)濺(jian)(jian)射(she)(she)速度越快，以Cu,Au,Ag等高(gao)，Ti,Mo,Ta,W等低。一(yi)般(ban)在(zai)0.1-10原(yuan)子(zi)/離子(zi)。離子(zi)可(ke)以直流輝(hui)光(guang)放電(dian)(glowdischarge)產(chan)生(sheng)，在(zai)10-1—10Pa真空(kong)(kong)度，在(zai)兩(liang)極間加高(gao)壓產(chan)生(sheng)放電(dian)，正(zheng)離子(zi)會(hui)轟擊負(fu)電(dian)之靶材(cai)(cai)(cai)而(er)濺(jian)(jian)射(she)(she)也(ye)靶材(cai)(cai)(cai)，而(er)鍍(du)(du)至被鍍(du)(du)物上。正(zheng)常(chang)輝(hui)光(guang)放電(dian)(glowdischarge)的電(dian)流密(mi)度與(yu)陰極物質與(yu)形狀(zhuang)、氣體種類壓力(li)等有關(guan)。濺(jian)(jian)鍍(du)(du)時應盡可(ke)能維持其(qi)穩(wen)定(ding)。任何材(cai)(cai)(cai)料(liao)皆可(ke)濺(jian)(jian)射(she)(she)鍍(du)(du)膜，即使高(gao)熔(rong)點材(cai)(cai)(cai)料(liao)也(ye)容易濺(jian)(jian)鍍(du)(du)，但對非導體靶材(cai)(cai)(cai)須以射(she)(she)頻（RF）或脈沖(chong)（pulse）濺(jian)(jian)射(she)(she)；且(qie)因導電(dian)性較(jiao)(jiao)差，濺(jian)(jian)鍍(du)(du)功率(lv)及(ji)速度較(jiao)(jiao)低。金(jin)(jin)屬(shu)濺(jian)(jian)鍍(du)(du)功率(lv)可(ke)達10W/cm2,非金(jin)(jin)屬(shu)＜5W/cm2。真空(kong)(kong)鍍(du)(du)膜機的產(chan)業集群。河北真空(kong)(kong)鍍(du)(du)膜機多(duo)少錢

【真空(kong)鍍(du)(du)膜之磁(ci)控濺(jian)(jian)(jian)射(she)(she)】在(zai)陰(yin)極靶(ba)表面(mian)形成一(yi)正交(jiao)電(dian)磁(ci)場，在(zai)此區電(dian)子密(mi)度高，進(jin)而提(ti)(ti)高離子密(mi)度，使得濺(jian)(jian)(jian)鍍(du)(du)率提(ti)(ti)高(一(yi)個數(shu)量級)，濺(jian)(jian)(jian)射(she)(she)速度可達(da)0.1—1 um/min膜層附著力較蒸鍍(du)(du)佳，是目(mu)前實用(yong)的鍍(du)(du)膜技術(shu)之一(yi)。其(qi)它有偏壓濺(jian)(jian)(jian)射(she)(she)、反應濺(jian)(jian)(jian)射(she)(she)、離子束濺(jian)(jian)(jian)射(she)(she)等(deng)鍍(du)(du)膜技術(shu) 濺(jian)(jian)(jian)鍍(du)(du)機(ji)設備與工藝濺(jian)(jian)(jian)鍍(du)(du)機(ji)由真空(kong)室，排氣(qi)系統，濺(jian)(jian)(jian)射(she)(she)源(yuan)(yuan)和控制系統組成。濺(jian)(jian)(jian)射(she)(she)源(yuan)(yuan)又分為(wei)電(dian)源(yuan)(yuan)和濺(jian)(jian)(jian)射(she)(she)qiang（sputter gun）。磁(ci)控濺(jian)(jian)(jian)射(she)(she)qiang分為(wei)平(ping)面(mian)型(xing)(xing)和圓柱(zhu)型(xing)(xing)，其(qi)中(zhong)平(ping)面(mian)型(xing)(xing)分為(wei)矩型(xing)(xing)和圓型(xing)(xing)，靶(ba)材(cai)料利用(yong)率30- 40%，圓柱(zhu)型(xing)(xing)靶(ba)材(cai)料利用(yong)率>50% 濺(jian)(jian)(jian)射(she)(she)電(dian)源(yuan)(yuan)分為(wei)：直(zhi)流（DC）、射(she)(she)頻（RF）、脈(mo)沖(chong)（pulse）， 直(zhi)流：800-1000V（Max）導體(ti)用(yong)，須可災(zai)弧。 射(she)(she)頻：13.56MHZ，非導體(ti)用(yong)。 脈(mo)沖(chong)：泛用(yong)，新(xin)發展出(chu)上(shang)海真空(kong)鍍(du)(du)膜機(ji)品牌PVD真空(kong)鍍(du)(du)膜機(ji)的公司。

【真空鍍(du)(du)膜(mo)(mo)(mo)的(de)分類】真空鍍(du)(du)膜(mo)(mo)(mo)的(de)鍍(du)(du)層結構(gou)一(yi)(yi)(yi)(yi)般(ban)(ban)為(wei)：基(ji)材、底(di)漆、真空膜(mo)(mo)(mo)層、面漆，因(yin)靶(ba)材理(li)化(hua)特(te)性直接(jie)決定膜(mo)(mo)(mo)層的(de)特(te)性，根據膜(mo)(mo)(mo)層的(de)導電(dian)與(yu)否(fou)，可(ke)(ke)分為(wei)導電(dian)真空鍍(du)(du)膜(mo)(mo)(mo)（VM）和不導電(dian)真空鍍(du)(du)膜(mo)(mo)(mo)（NCVM）兩種。VM：一(yi)(yi)(yi)(yi)般(ban)(ban)用在化(hua)妝品(pin)類、NB類、3C類、汽配類按鍵、裝(zhuang)飾(shi)(shi)框(kuang)、按鍵RING類飾(shi)(shi)品(pin)的(de)表(biao)面處理(li)，其表(biao)面效果與(yu)水(shui)(shui)電(dian)鍍(du)(du)相媲美，靶(ba)材一(yi)(yi)(yi)(yi)般(ban)(ban)為(wei)鋁、銅、錫(xi)(xi)、金(jin)、銀等(deng)。NCVM：具有金(jin)屬質感、透(tou)明，但不導電(dian)，一(yi)(yi)(yi)(yi)般(ban)(ban)用在通訊類、3C類對抗擾要較(jiao)高的(de)機(ji)(ji)(ji)殼、裝(zhuang)飾(shi)(shi)框(kuang)、按鍵件、RING類飾(shi)(shi)品(pin)的(de)表(biao)面處理(li)，其表(biao)面效果為(wei)水(shui)(shui)電(dian)鍍(du)(du)不可(ke)(ke)取代，靶(ba)材一(yi)(yi)(yi)(yi)般(ban)(ban)為(wei)銦(yin)、銦(yin)錫(xi)(xi)。三、擴(kuo)散泵(beng)連續使用6個月以(yi)上，抽的(de)速度會顯然(ran)(ran)變(bian)慢，當操作不當應拆(chai)去(qu)聯結水(shui)(shui)管(guan)，卸下(xia)電(dian)爐(lu)盤，將一(yi)(yi)(yi)(yi)級噴嘴擰出，先用汽油將泵(beng)腔及泵(beng)膽清洗一(yi)(yi)(yi)(yi)遍，再(zai)用洗衣粉(fen)兌(dui)水(shui)(shui)清洗一(yi)(yi)(yi)(yi)遍，然(ran)(ran)后用清水(shui)(shui)徹底(di)清洗干凈，待水(shui)(shui)份揮發干以(yi)后，裝(zhuang)好(hao)泵(beng)膽，加入新擴(kuo)散泵(beng)油，并(bing)裝(zhuang)回機(ji)(ji)(ji)體，接(jie)好(hao)水(shui)(shui)管(guan)，裝(zhuang)好(hao)電(dian)爐(lu)盤，便(bian)可(ke)(ke)以(yi)重(zhong)新開(kai)機(ji)(ji)(ji)。在重(zhong)新開(kai)機(ji)(ji)(ji)前，要注意檢漏工作。

【真(zhen)空(kong)鍍(du)膜(mo)(mo)設(she)備之真(zhen)空(kong)的(de)獲得】： 真(zhen)空(kong)泵(beng)(beng)(beng)(beng)(beng)：真(zhen)空(kong)泵(beng)(beng)(beng)(beng)(beng)是(shi)指利用(yong)(yong)(yong)機械、物(wu)理、化(hua)學(xue)或(huo)物(wu)理化(hua)學(xue)的(de)方法(fa)對被抽(chou)容器進(jin)行抽(chou)氣(qi)而獲得真(zhen)空(kong)的(de)器件(jian)或(huo)設(she)備。通俗(su)來(lai)講，真(zhen)空(kong)泵(beng)(beng)(beng)(beng)(beng)是(shi)用(yong)(yong)(yong)各種(zhong)方法(fa)在某一(yi)封(feng)閉(bi)空(kong)間中改(gai)善、產生(sheng)和(he)維持真(zhen)空(kong)的(de)裝(zhuang)置(zhi)。 按真(zhen)空(kong)泵(beng)(beng)(beng)(beng)(beng)的(de)工作原理，真(zhen)空(kong)泵(beng)(beng)(beng)(beng)(beng)基本上可(ke)以分為(wei)兩(liang)種(zhong)類型，即氣(qi)體(ti)捕集泵(beng)(beng)(beng)(beng)(beng)和(he)氣(qi)體(ti)傳(chuan)輸泵(beng)(beng)(beng)(beng)(beng)。其廣fan用(yong)(yong)(yong)于(yu)冶金、化(hua)工、食品、電子鍍(du)膜(mo)(mo)等(deng)行業。 A、粗真(zhen)空(kong)泵(beng)(beng)(beng)(beng)(beng)（Rough Vacuum Pump）：一(yi)般用(yong)(yong)(yong)于(yu)抽(chou)粗真(zhen)空(kong)，有油(you)泵(beng)(beng)(beng)(beng)(beng)和(he) 干(gan)泵(beng)(beng)(beng)(beng)(beng)。從結(jie)構(gou)上可(ke)分幾種(zhong)： 旋轉(zhuan)葉片泵(beng)(beng)(beng)(beng)(beng)：油(you)泵(beng)(beng)(beng)(beng)(beng)，極限真(zhen)空(kong)可(ke)達10&3Torr，抽(chou)速1~650CFM 隔膜(mo)(mo)泵(beng)(beng)(beng)(beng)(beng)：干(gan)泵(beng)(beng)(beng)(beng)(beng)，極限真(zhen)空(kong)1Torr左(zuo)右，抽(chou)速<10CFM 往復式活塞泵(beng)(beng)(beng)(beng)(beng)：干(gan)泵(beng)(beng)(beng)(beng)(beng)，極限真(zhen)空(kong)10&2Torr，抽(chou)速6~32CFM 渦旋式真(zhen)空(kong)泵(beng)(beng)(beng)(beng)(beng)：干(gan)泵(beng)(beng)(beng)(beng)(beng)，極限真(zhen)空(kong)10&2Torr，抽(chou)速12~25CFM 螺旋泵(beng)(beng)(beng)(beng)(beng)：干(gan)泵(beng)(beng)(beng)(beng)(beng)，極限真(zhen)空(kong)10&3Torr，抽(chou)速30~318CFM真(zhen)空(kong)鍍(du)膜(mo)(mo)機的(de)應(ying)用(yong)(yong)(yong)領(ling)域。

【真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)鍍(du)膜(mo)(mo)(mo)(mo)(mo)機(ji)鍍(du)塑料件(jian)時抽(chou)(chou)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)時間過長是(shi)(shi)什么(me)原(yuan)因？】 (1) 真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)室(shi)(shi)(shi)有(you)漏(lou)(lou)氣(qi)(qi)(qi)(qi)現象：da家都(dou)(dou)知道，真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)蒸發(fa)鍍(du)膜(mo)(mo)(mo)(mo)(mo)機(ji)是(shi)(shi)的(de)基本條件(jian)是(shi)(shi)工(gong)件(jian)在真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)狀(zhuang)態下才能(neng)進行(xing)鍍(du)膜(mo)(mo)(mo)(mo)(mo)加工(gong)的(de)，若真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)室(shi)(shi)(shi)有(you)漏(lou)(lou)氣(qi)(qi)(qi)(qi)現象而沒有(you)經過檢(jian)漏(lou)(lou)找(zhao)出(chu)漏(lou)(lou)氣(qi)(qi)(qi)(qi)位(wei)置(zhi)，則真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)鍍(du)很長時間都(dou)(dou)不(bu)能(neng)抽(chou)(chou)得上(shang)來的(de)；(2)即使真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)室(shi)(shi)(shi)沒有(you)漏(lou)(lou)氣(qi)(qi)(qi)(qi)，因為塑料產品(pin)的(de)放氣(qi)(qi)(qi)(qi)量da，所以抽(chou)(chou)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)，特(te)別是(shi)(shi)高真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)很難(nan)達到。真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)室(shi)(shi)(shi)內太臟放氣(qi)(qi)(qi)(qi)，而且由(you)于塑料產品(pin)的(de)放氣(qi)(qi)(qi)(qi)，造成(cheng)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)室(shi)(shi)(shi)內鍍(du)膜(mo)(mo)(mo)(mo)(mo)氣(qi)(qi)(qi)(qi)體的(de)不(bu)純，有(you)雜氣(qi)(qi)(qi)(qi)的(de)存在，造成(cheng)鍍(du)膜(mo)(mo)(mo)(mo)(mo)產品(pin)的(de)顏色(se)發(fa)暗，發(fa)黃，發(fa)黑等。 （3）也許(xu)是(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)機(ji)組的(de)抽(chou)(chou)氣(qi)(qi)(qi)(qi)能(neng)力不(bu)夠了，油被污染(ran)或氧化(hua)了。 （4）真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)室(shi)(shi)(shi)有(you)漏(lou)(lou)水。 （5）抽(chou)(chou)空(kong)(kong)(kong)管(guan)道有(you)漏(lou)(lou)氣(qi)(qi)(qi)(qi)。真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)鍍(du)膜(mo)(mo)(mo)(mo)(mo)機(ji)參數怎么(me)調(diao)？河北真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)鍍(du)膜(mo)(mo)(mo)(mo)(mo)機(ji)多少(shao)錢

真空鍍膜(mo)機的升(sheng)級改(gai)造。河北(bei)真空鍍膜(mo)機多(duo)少錢(qian)

現有(you)的(de)(de)(de)(de)真空(kong)(kong)鍍(du)(du)(du)(du)(du)膜(mo)機(ji)，主要(yao)用于一(yi)些放(fang)氣量較少(shao)的(de)(de)(de)(de)普通玻璃(li)上鍍(du)(du)(du)(du)(du)膜(mo)，由(you)于大(da)(da)面(mian)(mian)積(ji)有(you)機(ji)玻璃(li)放(fang)氣量較大(da)(da)，熱變形(xing)溫度低，剛性低，因此現有(you)的(de)(de)(de)(de)真空(kong)(kong)鍍(du)(du)(du)(du)(du)膜(mo)機(ji)無法鍍(du)(du)(du)(du)(du)制大(da)(da)面(mian)(mian)積(ji)有(you)機(ji)玻璃(li)。現有(you)的(de)(de)(de)(de)鍍(du)(du)(du)(du)(du)膜(mo)機(ji)蒸發源間呈正(zheng)方形(xing)分布，這(zhe)樣(yang)鍍(du)(du)(du)(du)(du)出的(de)(de)(de)(de)膜(mo)層均勻(yun)性差，無法保證大(da)(da)面(mian)(mian)積(ji)有(you)機(ji)玻璃(li)在鍍(du)(du)(du)(du)(du)制過程(cheng)中(zhong)不變形(xing)。為了克服(fu)現有(you)技術之不足，提供一(yi)種真空(kong)(kong)鍍(du)(du)(du)(du)(du)膜(mo)系(xi)統，本(ben)系(xi)統由(you)真空(kong)(kong)鍍(du)(du)(du)(du)(du)膜(mo)系(xi)統和真空(kong)(kong)手套(tao)箱(xiang)系(xi)統集成而成，可在高(gao)真空(kong)(kong)蒸鍍(du)(du)(du)(du)(du)腔(qiang)室中(zhong)完成薄膜(mo)蒸鍍(du)(du)(du)(du)(du)，并在手套(tao)箱(xiang)高(gao)純惰(duo)性氣體氛圍下進行樣(yang)品(pin)的(de)(de)(de)(de)存放(fang)、制備(bei)以及(ji)蒸鍍(du)(du)(du)(du)(du)后樣(yang)品(pin)的(de)(de)(de)(de)檢測。河(he)北真空(kong)(kong)鍍(du)(du)(du)(du)(du)膜(mo)機(ji)多少(shao)錢

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